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Project at a Glance

Contents on the CD Rom

  • Trimethylgallium, Ga(CH3)3, often abbreviated to TMG or TMGa, is the preferred metal organic source of gallium for metal organic vapour phase epitaxy (MOVPE) of gallium-containing compound semiconductors, such as GaAs, GaN, GaP, GaSb, InGaAs, InGaN,
    AlGaInP, InGaP and AlInGaNP.
  • TMG is a clear, colorless, pyrophoric liquid.
  • TMG is known to react violently with water and other compounds that are capable of providing labile and active hydrogen.
  • Trimethylgallium may be prepared by the reaction of dimethylzinc with gallium trichloride.
  • The less volatile diethyl ether adduct can be prepared by using methylmagnesium iodide in ether in place of dimethylzinc; the ether ligands may be displaced with liquid ammonia as well.
  • The material is used in the production of LED lighting and semiconductors as a metal organic chemical vapor deposition precursor.
  • Trimethylgallium (TMG) Ga(CH3)3 Gallium occurs in trace amounts in bauxite and zinc ores. It seems that the most competitive base material for the semiconductor production is gallium.
  • Trimethyl-gallium has approximately the consistency of water and is a colourless fluid, which has a boiling point of 60 degree C, has an explosion-like reaction with water, and flames up on its own when reacting with air.
  • GaN films were grown on (0001) sapphire substrates in a temperature range of 500-950°C by exposing the substrates to
    trimethylgallium (TMG) and NH3 one at a time.
  • Trimethylgallium (TMG) and trimethylindium (TMIn) were used as the Ga and In precursors, and high-purity ammonia (NH3) gas was used as the nitrogen source.
  • Metal organic chemical vapor deposition growth of GaN films using trimethylgallium (TMGa) and triethylgallium (TEGa) sources exhibited the different growth mechanisms and properties of GaN films.
  • Trimethylgallium (TMGa) is the most widely used source for GaAs MOVPE. A room temperature (20°C) V.P. of 182 torr makes it suitable for both atmospheric and low pressure applications.
  • In semiconductor manufacturing, Trimethyl gallium (TMGa) is used in OrganoMetallic Vapor Phase Epitaxy (MOCVD) for the deposition of epitaxial GaAs or GaN layers.
  • Undoped GaAs has been successfully grown by chemical beam epitaxy (CBE) via surface decomposition process using arsine (AsH3) and Trimethyl gallium.
  • High temperature gas phase reactions between trimethyl gallium and ammonia were studied by means of in situ mass spectroscopy in an isothermal flow tube reactor.
  • The most common precursor for MOCVD of GaN are Trimethyl gallium and ammonia.
General Information & Process
  • Trimethylgallium general information
  • Trimethyl gallium, Trimethyl gallium etherate and trimethyl gallium ammine
  • High temperature adduct formation of trimethylgallium and ammonia
  • Some insight in to the nature of the surface chemical processes involved in the movpe growth of GaAs from arsine and trimethyl or trimethyl gallium


  • Growth and characterization of GaN films on (0001) sapphire substrates by alternate supply of trimethylgallium and NH3
  • Influence of sapphire annealing in trimethylgallium
    atmosphere on GaN epitaxy by MOCVD
  • Ligand exchange reactions in InGaAs metalorganic
    vapor-phase epitaxy
  • Structural and Optical Properties of InGaN/GaN Single Quantum Well Grown via MOCVD
  • Synthesis and purification of some main group organometallic precursors for compound semiconductors
  • Characteristics of GaN grown by metalorganic chemical vapor deposition using trimethylgallium and triethylgallium


  • Comparative studies of Si-doped n-type MOVPE GaAs on Ge and GaAs substrates
  • Spectroscopic studies of exchange and pyrolysis reactions in mixtures of trimethylamine alane, trimethylgallane and triethylgallane
  • A Systematic Study on the Growth of GaAs Nanowires by Metal-Organic Chemical Vapor Deposition


  • Trimethylgallium, a method for producing the same and a gallium nitride thin film grown from the trimethyl gallium
  • Method of making P-type compound semiconductor employing trimethylgallium, trimethylarsenic and arsine
  • Synthesis of high purity dimethylaluminum hydride
  • Cleaning process of harmful gas
  • Method of chemically vapor depositing a thin film of Gas

Company Profiles

  • Company from Japan
  • Company from China
  • Company from Japan
  • Company from Australia
  • Company from Japan
  • Company from US
  • Company from Japan


  • Consultancy from America
  • Consultancy from China
  • Consultancy from New York
  • Consultancy from USA
  • Consultancy from Utah

Plant & Turnkey

  • Plant from Canada
  • Plant from United States
  • Turnkey from China
  • Turnkey from Singapore


  • Growth of Ga-doped ZnO thin film prepared by MOCVD for TCO application
  • Life Cycle Assessment of Solid State Lighting Applications
  • Validating gallium nitride growth kinetics using a precursor delivery showerhead as a novel chemical reactor
  • Characterization of gallium-containing zeolites for
    catalytic applications


  • Trimethylgallium SSG
  • Production Quantities of EpiPure™ TMGa
  • Trimethylgallium TMGa
  • Trimethyl gallium

Material Safety Data Sheet

  • Trimethyl gallium
  • Product Safety Assessment - Trimethylgallium
  • Trimethylgallium - OMGA079
  • TMG SSG (Trimethyl gallium)
  • Trimethyl gallium Optograde
  • Trimethyl gallium msds
  • MSDS for Trimethyl gallium


  • Electrochemical technology
    for the production of
  • Identification of a Gallium-Containing Carbon Deposit
    Produced by Decomposition of Trimethyl Gallium
  • Identification of Black Deposits Produced during the Hydride-OM VPE Growth of GaN
  • New method of MOVPE process design for the growth of FGM AlGaAs/GaAs photodetectors


  • Gallium
  • Implementation of Process Simulation Tools and Temperature Control Methods
    for High Yield MOCVD Growth
  • Organometallic Vapor Phase Epitaxy Technical Program
  • In situ mechanistic studies of MOCVD growth of semiconductors


  • Trimethylgallium Suppliers
  • Selling Leads of Trimethyl gallium
  • Trimethylgallium Exporters
  • Suppliers & Manufacturers of Trimethylgallium

Raw Material Suppliers

  • Dimethylzinc Suppliers
  • Exporters of Dimethylzinc
  • Suppliers of Methyl Magnesium Iodide
  • Suppliers & Manufacturers of gallium trichloride
  • Selling Leads of gallium trichloride

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