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Information @ a Glance

Contents on the CD Rom

  • Tungsten(VI) fluoride, also known as tungsten hexafluoride, is a colorless gas.
  • Tungsten Hexafluoride is nonflammable, but highly corrosive and very toxic.
  • Tungsten Hexafluoride is the densest known gas at a pressure of 1 atm and room temperature (25 C).
  • The molecule is octahedral with the symmetry point group of Oh.
  • Tungsten(V1) fluoride is a colorless gas that condenses to a colorless liquid at 19.5 and freezes to a crystalline white solid at 2.5.
  • Tungsten(V1) fluoride fumes in moist air and must be handled under anhydrous conditions.
  • The specific gravity of the liquid is 3.441 at 15. It may be handled in carefully outgassed glass systems provided that greases, mercury, and organic materials, as well as water, are absent from the system.
  • Tungsten Hexafluoride gas is most commonly used in the production of semiconductor circuits and circuit boards, through the process of chemical
    vapor deposition.
  • Tungsten hexafluoride of a purity high enough for semiconductor CVD is produced by the reaction of fluorine gas with tungsten metal.
  • The metal is placed in a heated reactor, slightly pressurized to 1.2 to 2.0 psi, with a constant flow of WF6 infused with a small amount of fluorine gas.


  • Introduction about Tungsten Hexafluoride
  • Synonyms of Tungsten Hexafluoride

Company Profiles & Suppliers

  • Company from California
  • Company from Ohio
  • Company from Pennyslvania
  • Company from SouthKorea
  • Company from Tokyo
  • Company from USA
  • Suppliers of Tungsten Hexafluoride

Consultant & Plant

  • Plant from South Africa
  • Plant from Tokyo
  • Plant from USA
  • Consultant from London

Process & Properties

  • The Chemistry of Metal CVD
  • Selective solvent extraction of Tungsten(VI) with N-n-octylaniline in Xylene
  • Inorganic Synthesis
  • Tungsten Hexafluoride Properties


  • Tungsten Hexafluoride Msds
  • Tungsten Hexafluoride
  • Msds for Tungsten Hexafluoride
  • HexafluoroTungsten Msds
  • Tungsten Hexafluoride Msds
  • Safety data sheet for Tungsten Hexafluoride
Patent & Technology
  • Purification of tungsten hexafluoride
  • Method for making UHP tungsten hexafluoride
  • Method of refining tungsten hexafluoride containing molybdenum hexafluoride as an impurity
  • Gas chromatographic analysis of trace gas impurities in tungsten hexafluoride
  • Hazards Fact Sheet
  • Preparing Hazards materials for military air shipments
  • National Emission Standards for Hazardous Air Pollutants
  • Principles for the safe handling and distribution of highly toxic gases and mixtures
RawMaterial Suppliers
  • Chlorine Manufacturers
  • Chlorine Exporters
  • Chlorine Selling leads
  • TungstenOxide Suppliers
  • Development of the Table of Initial Isolation and Protective Action Distances for the  Emergency Responce Guidebook
  • Chemical safety manual
  • A Military Guide to Terrorism in the Twenty-First Century
  • Tungsten Hexafluoride Report

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